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Lam Research 853-266935-005 – DC Power Distribution & RF Match Controller Module

Lam Research 853-266935-005 – DC Power Distribution & RF Match Controller Module

Original price was: $3,200.00.Current price is: $2,800.00.

Product ID: 853-266935-005
Type Designation: DC Power Distribution / RF Match Controller PCB Module
Catalog Description: Lam Research rack-mountable electronic board for low-voltage DC power allocation, sensor signal conditioning, and real-time RF matcher logic control in etch and CVD/ALD platforms.
Core Function: Sits between the main control cabinet and process chamber, distributing regulated DC power to subsystems, conditioning analog sensor signals, and executing closed-loop control logic for RF matching networks. One thing to note is that this module directly influences etch uniformity and film deposition consistency.
HS Code: Typically 8486.90 / 8486909000 (parts for semiconductor manufacturing equipment); alternative classification 8537.10 / 8537109000
Net Weight: Approximately 1.20 kg – 1.60 kg (including internal metal shielding and multi-pin connectors)
Warranty: 12 months
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Description

Ordering & Delivery Assurance

The Lam Research 853-266935-005 carries a 12-month warranty from date of delivery. In-stock units ship within1 week; sourced units require a maximum of 4 weeks. Payment terms are 50% advance with balance due before dispatch, and all shipments are sent via FedEx, UPS, or DHL express courier.

Lam Research 853-266935-005 DC Power Distribution and RF Match Controller Module

Key Practical Features

Product ID: 853-266935-005
Type Designation: DC Power Distribution / RF Match Controller PCB Module
Catalog Description: Lam Research rack-mountable electronic board for low-voltage DC power allocation, sensor signal conditioning, and real-time RF matcher logic control in etch and CVD/ALD platforms.
Core Function: Sits between the main control cabinet and process chamber, distributing regulated DC power to subsystems, conditioning analog sensor signals, and executing closed-loop control logic for RF matching networks. One thing to note is that this module directly influences etch uniformity and film deposition consistency.
HS Code: Typically 8486.90 / 8486909000 (parts for semiconductor manufacturing equipment); alternative classification 8537.10 / 8537109000
Net Weight: Approximately 1.20 kg – 1.60 kg (including internal metal shielding and multi-pin connectors)
Warranty: 12 months from delivery date

Technical Specifications

Power Requirements 24 VDC input; distributes regulated low-voltage DC to chamber subsystems and sensor circuits
Dimensions & Mounting Approximately 320 mm × 240 mm × 45 mm; standard Lam Research rack-mount card slot with metal enclosure
Operating Temperature 0 °C to +50 °C (typical for semiconductor equipment electronics bay)
Signal I/O Types Analog sensor inputs (temperature, pressure, flow), digital logic outputs, RF match position feedback signals
Communication Interfaces Internal backplane bus, multi-pin ribbon cable to RF match network, discrete I/O to chamber sensors
Installation Method Slide-in card guide within equipment rack; secured with retention screws; ESD precautions required during handling

Compatible & Supporting Modules

853-266935-003 – Previous hardware revision of the same Lam Research power distribution board. Shares identical form factor and connector pinout; firmware update may be required for full parity with the 853-266935-005 revision.

853-020285-002 – RF match network interface board used in Alliance and Kiyo platforms. Provides the physical link between the 853-266935-005 controller output and the motorized capacitor drive assembly.

853-015672-001 – DC power distribution backplane for 2330 and Vector series racks. Carries the main bus rails that feed the 853-266935-005 module and adjacent card slots.

Compliance & Quality Backing

The Lam Research 853-266935-005 is manufactured in the USA and conforms to CE marking requirements and RoHS substance restrictions applicable to semiconductor equipment components. Each unit is backed by a 12-month warranty, with in-stock delivery within 1 week and payment structured as 50% advance, balance before dispatch via FedEx, UPS, or DHL.

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➱ email mailto: sales@xiongbagk.cn
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