ZMI-4004 ZMI-4004 4-Axis VME64x Measurement Board

ZMI-4004 is a high-precision displacement measurement board launched by Zygo, belonging to the ZMI series products, mainly used for displacement and distance measurement with sub nanometer resolution. Here are the main product details:
Basic characteristics
Number of measurement axes: Supports 4 measurement axes.
Board type: 6U VME64x form factor, suitable for integration into VME chassis.
Minimum optical power: 1.0 µ W.
Position resolution: 0.15 nm.
Maximum speed: ± 2.55 m/s.
Accuracy at maximum speed: 0.2 nm.
Loop error compensation: supported.

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Description

ZMI-4004 ZMI-4004 4-Axis VME64x Measurement Board

Product Description

ZMI-4004 is a high-precision displacement measurement board launched by Zygo, belonging to the ZMI series products, mainly used for displacement and distance measurement with sub nanometer resolution. Here are the main product details:
Basic characteristics
Number of measurement axes: Supports 4 measurement axes.
Board type: 6U VME64x form factor, suitable for integration into VME chassis.
Minimum optical power: 1.0 µ W.
Position resolution: 0.15 nm.
Maximum speed: ± 2.55 m/s.
Accuracy at maximum speed: 0.2 nm.
Loop error compensation: supported.
compatibility
ZMI-4004 is compatible with various lasers from Zygo, such as 7702, 7714, and 7724. In addition, it also supports use with ZMI series interferometers.

ZMI-4004

Product parameter

Features:
  • 0.15 nm Resolution
  • 2.55 m/sec Velocity
  • 4-Axes Per Board
  • 10 MHz Data Rate
  • ST Fiber Optic and HSSDC Electrical Connections

The Zygo ZMI-4004 4-Axis VME64x Measurement Board enables next generation lithography tools to achieve significantly improved overlay and higher throughputs. The ZMI-4004 is part of a total Displacement Measuring Interferometer solution insuring the highest resolution and velocity while providing superior dynamic accuracy and data age uncertainty.

Application field

This board is suitable for position measurement applications that require extremely high precision, such as wafer stages, stacked worktable systems, gantry systems, turning mirrors, etc.
Other features
Adopting a 32-bit microprocessor, 16 bit DAC, and 24 bit ADC to ensure high-precision measurement and control.
Provide high stability and precision measurement performance, suitable for various precision metrology applications.

Please contact Sunny sales@xiongbagk.cn for the best price.

➱ sales manager: Sunny
➱ email mailto: sales@xiongbagk.cn
➱ Skype/WeChat: 18059884797
➱ phone/Whatsapp: + 86 18059884797
➱ QQ: 3095989363
➱ Website:www.sauldcs.com

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