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Description
Product Overview
The Applied Materials (AMAT) 0100-71521 is a high-precision power distribution module designed for advanced semiconductor manufacturing equipment, particularly in plasma-enhanced chemical vapor deposition (PECVD) and etching systems. As part of Applied Materials’ equipment ecosystem, this module ensures stable power delivery to RF generators and electrostatic chucks (ESCs), critical for maintaining uniform thin-film deposition on 300mm wafers. The AMAT 0100-71521 integrates adaptive voltage regulation and arc suppression technology, minimizing micro-arcing during high-frequency plasma processes. Its compatibility with AMAT’s Producer® and Centura® platforms makes it a key component in fabricating logic chips, memory devices, and advanced packaging layers. The module’s MIL-spec connectors and EMI-shielded design ensure reliability in cleanroom environments (Class 1-100).
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | 0100-71521 |
| Manufacturer | Applied Materials (AMAT) |
| Product Type | Power Distribution Module |
| Input Voltage | 200–480 VAC, 3-Phase |
| Output Power | 15 kW (Continuous) |
| Frequency Range | 13.56 MHz ±5% (RF Coupling) |
| Voltage Stability | ±0.5% (Full Load) |
| Communication Interface | RS-485, EtherCAT |
| Operating Temperature | 0°C to 55°C |
| Protection Features | Overcurrent, Overtemperature, Arc Detection |
| Compatibility | Producer® GT PECVD, Centura® DPS II |
| Dimensions | 320×210×50 mm |
| Certifications | SEMI S2/S8, CE, UL |
0100-71521
Key Features
Plasma Process Optimization
The AMAT 0100-71521 utilizes closed-loop impedance matching to maintain plasma density uniformity (±2% across 300mm wafers). Its arc management system detects and suppresses discharges within 10 μs, reducing particle defects by up to 40% in high-k dielectric deposition.
Modular Redundancy
Hot-swappable design allows replacement without interrupting vacuum chamber operations. Dual redundant power rails ensure 99.98% uptime in 24/7 semiconductor fabs.
Smart Diagnostics
Embedded sensors monitor RF forward/reflected power ratios, providing real-time feedback to AMAT’s E3® equipment control software. Predictive algorithms forecast capacitor aging, enabling proactive maintenance during scheduled tool downtime.
Applications
- 3D NAND Fabrication: Precise control of SiN/SiO₂ multilayer stacks for vertical memory cells.
- FinFET Transistor Production: Stable power delivery for atomic layer etching (ALE) of fin structures.
- Advanced Packaging: Low-temperature PECVD of dielectric barriers for hybrid bonding applications.
- Display Manufacturing: OLED encapsulation layer deposition on Gen 8.5 glass substrates.
- Power Semiconductor Processing: SiC epitaxial growth with reduced wafer bowing.
The module’s EtherCAT interface enables integration into Industry 4.0 smart factories, supporting SECS/GEM protocols for automated material handling systems (AMHS).
Related Products
- AMAT 0100-71234: High-current RF generator for 200mm wafer tools.
- 0190-33567: ESC temperature control unit with ±0.1°C accuracy.
- AMAT DPS-ADV: Advanced process kit for deep silicon etching.
- 0100-71890: Next-gen power module with 20 kW capacity and AI-driven fault prediction.
- Centura® G3 Upgrade Kit: Retrofit package for legacy system modernization.
Product Assurance
Applied Materials provides a 2-year warranty and onsite technical support for the 0100-71521, including:
- Cleanroom-Certified Service: Certified technicians perform replacements under ISO Class 3 conditions.
- Performance Guarantee: 100% factory testing with actual plasma load simulations.
- Lifecycle Management: Guaranteed spare parts availability for 10 years post-production.
- Cybersecurity: Encrypted firmware updates via AMAT’s Remote Service Gateway (RSG).
- Training: Free access to AMAT University modules on power system troubleshooting.
Please contact Sunny sales@xiongbagk.cn for the best price.
➱ sales manager: Sunny
➱ email mailto: sales@xiongbagk.cn
➱ Skype/WeChat: 18059884797
➱ phone/Whatsapp: + 86 18059884797
➱ QQ: 3095989363
➱ Website:www.sauldcs.com
