Description
Overview of AMAT 0190-26873
The AMAT 0190-26873 is a part number associated with Applied Materials (AMAT), a leading manufacturer of semiconductor fabrication equipment. While detailed public specifications for this specific component are limited due to proprietary restrictions, it is likely a critical spare part or subsystem used in semiconductor manufacturing tools, such as etch, deposition, or chemical mechanical planarization (CMP) systems.
Possible Applications
- Semiconductor Processing: Components for plasma etch chambers, CVD (Chemical Vapor Deposition) systems, or ion implanters.
- Wafer Handling: Robotics, lift pins, or alignment modules for wafer transfer.
- Vacuum Systems: Seals, valves, or sensors for maintaining process chamber integrity.
- Gas Delivery: Flow controllers, manifolds, or filters for precursor gases.
Typical Features (Based on AMAT Standards)
| Material Compatibility | High-purity ceramics, stainless steel, or fluoropolymers |
| Precision | Designed for sub-micron tolerances in semiconductor fab environments |
| Compatibility | Likely for use in AMAT tools like Centura®, Endura®, or Producer® platforms |
| Certifications | SEMI standards compliance (e.g., SEMI F72 for vacuum components) |

0190-15384
Procurement and Support
- Contact Applied Materials Customer Engineering for exact specifications, lead times, and pricing.
- Authorized distributors like Advanced Technology Services (ATS) or EquipNet may offer refurbished or surplus parts.
- Use AMAT’s MyApps portal for technical documentation (requires customer login).
Related Components
- AMAT 0190-xxxxx Series: Common in chamber kits, heater assemblies, or RF generators.
- AMAT 0200-20010: Turbo pump for vacuum systems.
- AMAT 0010-75059: Ceramic gas injector for etch tools.
Maintenance Notes
- Replacement requires AMAT-certified technicians to avoid tool qualification issues.
- Follow AMAT’s Preventive Maintenance schedules to minimize downtime.
- Use AMAT-approved cleaning protocols (e.g., dry nitrogen purge) to prevent contamination.
Note: Applied Materials part numbers are proprietary. For verified details, consult official documentation or contact AMAT support directly.
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