EP3-E-4-EN high frequency power controller

EP3-E-4-EN is a high frequency power controller that is widely used in etching, RIE, PECVD, ICP, RF sputtering, CVD

and PVD systems. It can be used as a power source for induction heating and dielectric heating equipment in factory systems,

as well as to provide a stable power output for other equipment requiring high-frequency power.
ALSTOM’s EP3-E-4-EN HF Power controller has the following technical features:
High frequency power controller: can provide high frequency power supply, suitable for a variety of equipment requiring

high frequency power supply, such as etching, RIE, PECVD, ICP, RF sputtering, CVD and PVD systems.
High reliability: Through strict quality control and testing, it can ensure stable operation

in various industrial environments, reducing the need for failure and maintenance.

Easy maintenance: The design takes into account the simplicity of maintenance and operation,

which is convenient for users to carry out daily maintenance and maintenance.Good stability: it can provide stable

power output under various working conditions to ensure the normal operation and production efficiency of the equipment.

Good scalability: supports a variety of communication protocols and control methods,

and can seamlessly connect and communicate with other industrial automation equipment.