中文版
Description
LAM 810-072903-014 RF Generator Interface Board for Semiconductor Equipment
Overview
LAM 810-072903-014 is a key electronic interface module (commonly known as circuit board, controller or I/O board) designed by LAM Research for its advanced semiconductor manufacturing equipment such as etching machines and chemical vapor deposition equipment. This component is not an independently operating device. Instead, it is integrated inside the Lam equipment and serves as the core communication and control hub between the RF Generator and the main control system of the equipment.
In plasma processes (such as plasma etching or deposition), the stability and precise control of the RF generator are of vital importance, as they directly affect the accuracy and uniformity of wafer processing. The 810-072903-014 board card is precisely the key bridge to ensure the realization of such precise control. Its performance and reliability are directly related to the normal operation of the equipment and the yield of the wafers.
Core features and advantages
1. Precise instruction translation and signal processing
This board card receives high-level instructions (such as setting power and frequency) from the device’s main computer (or industrial control computer) and converts them into low-level control signals that the RF generator can understand and execute.
Meanwhile, it collects the real-time status data returned by the RF generator (such as output power, reflected power, internal temperature, error code), and converts it into digital signals to feed back to the main control system, achieving closed-loop control and high-precision process monitoring.
2. Strong support for communication protocols
The board cards typically support industrial standard communication protocols, such as Ethernet, serial communication (RS-232/RS-485), or fiber Channel, ensuring high-speed and stable data exchange with the main control system.
It is also directly connected to the RF generator body through a dedicated internal bus or cable to achieve low-latency instruction transmission.
3. Comprehensive condition monitoring and fault protection:
The board card continuously monitors the key parameters of the radio frequency system. When anomalies are detected (such as excessive reflected power, failure of matcher tuning, or cooling system failure), it will immediately trigger the safety protection mechanism, send an Alarm or Error Code to the main control system, and can perform emergency Shutdown according to the preset program. To protect expensive RF generators and high-value wafer products.
810-072903-014
4. High reliability design and strict quality control
As a core component of semiconductor equipment, this board card uses industrial-grade or even military-grade components to ensure long-term stable operation in the harsh environment of 7×24-hour continuous operation (where there may be slight vibration, electromagnetic interference, and temperature fluctuations).
Adhering to strict manufacturing and testing standards to meet the semiconductor industry’s extremely high uptime (UpTime) requirements for equipment.
5. Plug and play and modular design
It adopts a modular design, which is convenient for replacement and maintenance within the equipment. It usually supports hot plugging or can be quickly replaced after a brief downtime of the equipment, minimizing downtime caused by maintenance.
Typical applications and significance
• Application equipment: Mainly used for LAM devices integrated with RF plasma systems, such as:
Conductor Etch equipment
Dielectric Etch equipment
Chemical vapor deposition (CVD) equipment
• Application process: In the manufacturing of advanced logic chips and memory (DRAM, 3D NAND), perform nanoscale precision etching and thin film deposition steps.
• Significance: The failure of this board card can cause the RF system to lose control or shut down, directly resulting in the entire equipment being unable to produce, which has a significant impact on the production capacity and yield of the wafer fab. Therefore, it is one of the key spare parts to ensure the continuous and stable operation of the production line.
Summary of Technical Specifications
• Manufacturer: LAM Research (Lam Research Group)
Model/Part Number: 810-072903-014 (Part numbers of LAM usually start with “810-” or “820-“)
• Types: Interface Board, Controller, I/O board
• Function: Communication and control interface for RF generator
• Interface types: Typically include Ethernet ports, serial ports, and dedicated RF generator connection ports.
• Compatibility: Specifically designed for specific models of LAM devices and the matching RF generators (such as AE, COMET, MKS, etc. brands).
Please contact Sunny sales@xiongbagk.cn for the best price.
➱ sales manager: Sunny
➱ email mailto: sales@xiongbagk.cn
➱ Skype/WeChat: 18059884797
➱ phone/Whatsapp: + 86 18059884797
➱ QQ: 3095989363
➱ Website:www.sauldcs.com
