E28B-23747  CAPACITANCE MANOMETER WITH ETCH SENSOR

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The Type E28D Baratron is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today’s lower process pressures.

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Description

E28B-23747  CAPACITANCE MANOMETER WITH ETCH SENSOR

Product description

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The Type E28D Baratron is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today’s lower process pressures.
Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Type 128, 628B, and E28B Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user’s compatible power supply/readout devices.

E28B-23747

Product parameter

Accurate
• Excellent long-term stability
• Percent of Reading accuracy for more precise output signal in lower pressure ranges
• Full Scale ranges low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes
• Measures total pressure directly, independent of gas composition
Robust
• All-Inconel corrosion-resistant wetted surfaces
• Integrated sump (US patent #5,822,685) provides particle protection
• Faster warm-up time
• Visual and electrical status of temperature and heater control circuit
• High overpressure rating for improved reliability
Compatible
• Cleanroom-compatible stainless steel package
• Compatible with earlier Baratron capacitance manometers, MKS power supply/readout modules, and pressure controllers
• CE and RoHS (Restriction

Application field

The IED offers control of one circuit breaker or contactor with dedicated push buttons for opening and closing. Control is achieved via the IED’s LHMI or a remote system (for example, the Protection and Control IED Manager COM600). By default, the IED is equipped with a single input interlocking scheme. For the creation of additional interlocking schemes, secured object control (SOC), blocking-based protection schemes or external tripping, binary GOOSE messaging can be used.
These additional protection and control schemes required by specific applications are configured using the LHMI, the WHMI and the optional application functionality of PCM600. The LHMI and the WHMI can be utilized for signal configuration, while the PCM600 is required for the configuration of the GOOSE messaging.

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