ZMI-4104 Displacement measurement Interferometers

The ZMI™ displacement measuring board uses optical signals from an interferometer driven by a ZMI™ laser source to calculate displacement.

The ZMI™ 501A comes in a convenient self-contained housing that offers two measuring shafts.

The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution for the most challenging

position metrology applications. These boards can be added modularistically to the VME chassis, supporting expansion to up to 64 measurement axes.

Our patented loop error reduction option automatically and seamlessly eliminates the inherent nonlinear errors

common in DMI systems for maximum measurement accuracy.

ZMI-4104

Flat mirror interferometer

The device measures flat mirror targets for tracking objects moving in multiple linear dimensions with a limited number

of rotations. ZYGO’s flat-mirror interferometers have high stability and reduce thermal errors. For example: wafer table, stack workbench system

Wavelength compensator

The device measures changes in refractive index and is used to compensate for other measuring axes. ZYGO’s compact wavelength

compensators provide high-precision feedback of refractive index changes for optimal displacement measurement performance under environmental conditions.

attachment

Perfect the measurement system by transmitting the light beam from the laser to the interferometer and eventually to the measurement

electronics. ZYGO offers a wide range of standard transition mirrors, spectroscopes, fiber couplers and fiber cables for flexible configuration of your measurement system.

Custom interferometer design

ZYGO specializes in the production of custom multi-axis interferometers for OEM applications. The custom design allows for combined

beam transmission in space-limited applications. It also reduces the time required to align the system, allowing for faster integration in the production process.