979B-01-0013 High-Power Q-Switched

Lumentum Q-Series lasers lead the market for high-power Q-switched diode-pumped
UV and green lasers used for a wide variety of high-precision, micromachining applications.
Whether for high-pulse-energy processing of materials such as ceramics, high-repetition-rate
processing of materials such as sapphire or silicon, or patterning thin-film solar cells, the
Q-Series lasers deliver unsurpassed performance combined with industry-leading uptime.
Due to the self-stabilizing characteristics of intracavity UV
harmonic generation, all Q-Series lasers exhibit inherently high
energy, high pulse-to-pulse stability and long-term output power
stability. In addition, the excellent thermal management of the
unique Nd: YAG-based direct-coupled pump (DCP) architecture
achieves excellent beam quality over a wide range of operating
conditions and maintains exceptionally stable beam position and
profile, which is important for processes requiring accurate
feature placement. These advantages enable Q-Series lasers to
achieve the tightest possible process tolerances for
micromachining and other materials-processing applications.

Q302-HD-6114A

Key Features
• Highest commercially available pulse energy and peak power
• Tighter process control due to superior energy stability
enabled by unique intracavity harmonic generation
• Capable of processing the widest range of materials due to
large selection of pulse energies, pulse widths, and
repetition rates
• High reliability due to low fluence in harmonic crystals and
no cavity optic coatings exposed to UV
• 355 and 532 nm outputs available
• Customization available upon request
Applications
• Wafer scribing
• Full-cut wafer dicing
• Low-k dielectric grooving
• Micromachining of silicon, sapphire, ceramic, and metal
• Micro-via drilling
• PCB and flexboard cutting